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Materials science in microelectronics; Vol.1 the relationships between thin film processing and structure

Machlin E.S.

Materials science in microelectronics; Vol.1 the relationships between thin film processing and structure - 2nd ed. - Amsterdam Elsevier 2005 - xiv, 256 p. HB 26 cm.

ISBN: 008044460X

Subjects--Uniform Titles:
Materials science- Microelectronics

Dewey Class. No.: 621.38152 / MAT

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