Fundamentals of microfabrication and nanotechnology: Vol-I (Record no. 152829)

MARC details
000 -LEADER
fixed length control field 00000nam a2200000 a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20251203112242.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781420055115
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
Item number MAD
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Madou, Marc J
245 ## - TITLE STATEMENT
Title Fundamentals of microfabrication and nanotechnology: Vol-I
Remainder of title solid-state physics, fluidics and analytical techniques ...
250 ## - EDITION STATEMENT
Edition statement 3rd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York
Name of publisher, distributor, etc. CRC Press
Date of publication, distribution, etc. 2012
300 ## - PHYSICAL DESCRIPTION
Extent xiv,641p.
Dimensions 26cm.
Other physical details HB
500 ## - GENERAL NOTE
General note includes index
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Microelectronics
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Integrated circuits-Design and construction
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Microelectromechanical systems-Design and construction
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Machining
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Lasers-Industrial applications
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Microelectronic packaging
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Microfabrication
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Nanostructured materials-Design and construction.
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Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Date acquired Cost, normal purchase price Total checkouts Full call number Barcode Koha item type
      Not for loan Central Library Central Library 05/01/2012 3476.80   621.38152 MAD 188878 Reference