Machlin E.S. <br/><br/>
Materials science in microelectronics; Vol.1  the relationships between thin film processing and structure 

 - 2nd ed. 
 - Amsterdam  Elsevier  2005 
 - xiv, 256 p.  HB  26 cm. 
<br/><br/><label>ISBN: </label>008044460X 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Materials science- Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAT