TY  - BOOK
AU  - Machlin E.S.
TI  - Materials science in microelectronics; Vol.1: the relationships between thin film processing and structure
SN  - 008044460X
U1  - 621.38152 
PY  - 2005///
CY  - Amsterdam
PB  - Elsevier
KW  - Materials science- Microelectronics
ER  -