Hsu,Tai-Ran <br/><br/>
MEMS and microsystems:  design, manufacture and nanoscale engineering 

 - 2nd Edn. 
 - New Jersey  John Wiley & Sons  2008 
 - xxv, 550p.  24cm.  HB 
<br/><br/><label>ISBN: </label>9780470083017 
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU