00343nam a2200121 a 450000500170000002000180001708200170003510000160005224500740006825000130014226000400015530000260019520251203111234.0  a9780470083017  a621.381bHSU  aHsu,Tai-Ran  aMEMS and microsystems:bdesign, manufacture and nanoscale engineering  a2nd Edn.  aNew JerseybJohn Wiley & Sonsc2008  axxv, 550p.c24cm.cHB