00000nam a2200000 a 4500 20251203111234.0 9780470083017 621.381 HSU Hsu,Tai-Ran MEMS and microsystems: design, manufacture and nanoscale engineering 2nd Edn. New Jersey John Wiley & Sons 2008 xxv, 550p. 24cm. HB Microelectronics: Microelectromechanical systems: Microelectronic packaging. _ 144904 C 118834 118834 0 0 0 0 PU PU 2009-04-10 5668.00 0 621.381 HSU 144904 2018-12-31 BK