Madou, Marc J <br/><br/>
Fundamentals of microfabrication and nanotechnology: Vol-I  solid-state physics, fluidics and analytical techniques ... 

 - 3rd ed. 
 - New York  CRC Press  2012 
 - xiv,641p.  HB  26cm. 
<br/><br/> includes index 
<br/><br/><label>ISBN: </label>9781420055115 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAD