00416nam a2200133 a 450000500170000002000180001708200190003510000180005424501240007225000120019626000300020830000250023850000190026320251203112242.0  a9781420055115  a621.38152bMAD  aMadou, Marc J  aFundamentals of microfabrication and nanotechnology: Vol-Ibsolid-state physics, fluidics and analytical techniques ...  a3rd ed.  aNew YorkbCRC Pressc2012  axiv,641p.c26cm.bHB  aincludes index