00963nam a2200277 a 450000500170000002000180001708200190003510000180005424501240007225000120019626000300020830000250023850000190026369000210028269000480030369000590035169000140041069000350042469000300045969000210048969000540051096400160056499700130058099900190059395200730061220251203112242.0  a9781420055115  a621.38152bMAD  aMadou, Marc J  aFundamentals of microfabrication and nanotechnology: Vol-Ibsolid-state physics, fluidics and analytical techniques ...  a3rd ed.  aNew YorkbCRC Pressc2012  axiv,641p.c26cm.bHB  aincludes index  aMicroelectronics  aIntegrated circuits-Design and construction  aMicroelectromechanical systems-Design and construction  aMachining  aLasers-Industrial applications  aMicroelectronic packaging  aMicrofabrication  aNanostructured materials-Design and construction.  bcdefg_  a188878 R  c152829d152829  00104071aPUbPUd2012-01-05g3476.80l0o621.38152 MADp188878yR