TY  - BOOK
AU  - Madou, Marc J
TI  - Fundamentals of microfabrication and nanotechnology:Vol-II: manufacturing techniques for microfabrication and nanotechno
SN  - 9781420055191
U1  - 621.38152 
PY  - 2012///
CY  - New York
PB  - CRC Press
N1  - includes index
ER  -