00442nam a2200169 a 450000500170000002000170001708200170003410000240005124500620007525000120013726000270014930000260017650000500020260000080025285600060026085600060026620251203112421.0  a978126517909  a621.395bGHA  aGhandhi, Sorab Kd_  aVLSI fabrication principlesbsilicon and gallium arsenide  a2nd ed.  aNew DelhibWileyc1994  axxiv,834p.c22cm.bPB  aincludes bibliographical references and index  bc_  f_  a_