TY  - BOOK
AU  - Ghandhi, Sorab K
TI  - VLSI fabrication principles: silicon and gallium arsenide
SN  - 978126517909
U1  - 621.395 
PY  - 1994///
CY  - New Delhi
PB  - Wiley
KW  - 
N1  - includes bibliographical references and index
ER  -