00769nam a2200265 a 450000500170000002000170001708200170003410000240005124500620007525000120013726000270014930000260017650000500020260000080025269000240026069000550028469000120033969000210035185600060037285600060037896400160038499700130040099900190041395200710043220251203112421.0  a978126517909  a621.395bGHA  aGhandhi, Sorab Kd_  aVLSI fabrication principlesbsilicon and gallium arsenide  a2nd ed.  aNew DelhibWileyc1994  axxiv,834p.c22cm.bPB  aincludes bibliographical references and index  bc_  aIntegrated circuits  aIntegrated circuits - Very large scale integration  aSilicon  aGallium arsenide  f_  a_  bcdefg_  a195908 C  c158484d158484  00104070aPUbPUd2012-12-22g463.20l0o621.395 GHAp195908yBK