00000nam a2200000 a 4500 20251203112421.0 9786676487093 621.381 HSU Hsu, Tai-Ran _ Mems microsystems design and manufacture _ New Delhi TataMcGraw Hill 2012 xii,436p. 22cm. PB _ Microelectronics microfinancial system microelectronic pakaging _ _ _ 195897 C 158490 158490 0 0 0 0 PU PU 2012-12-22 508.00 0 621.381 HSU 195897 BK