Morgan, Russ A. <br/><br/>
Plasma etching in semiconductor fabrication 

 - Oxford  Elsevier  1985 
 - x,316p.  22cm.  HB. 
 - Plasma technology .
<br/><br/><label>ISBN: </label>0444424199 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Plasma engineering
<br/><br/><label>Dewey Class. No.: </label>621.044  / MOR