00347nam a2200133 a 450000500170000002000150001708200170003210000200004924500480006926000270011730000240014449000220016863000230019020251203091037.0  a0444424199  a621.044bMOR  aMorgan, Russ A.  aPlasma etching in semiconductor fabrication  aOxfordbElsevierc1985  ax,316p.b22cm.cHB.  aPlasma technology  aPlasma engineering