Korvink,Jan G <br/><br/>
Semiconductors for micro-and Nanotechnology  an introduction for engineers 

 - Weinheim  Wiley-VCH  2002 
 - 340p.  PB  22cm. 
<br/><br/><label>ISBN: </label>3527302573 
<br/><br/><label>Dewey Class. No.: </label>620.5  / KOR