Your search returned 4 results.

1.

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MEMS and microsystems: design, manufacture and nanoscale engineering by

Hsu,Tai-Ran

Edition: 2nd Edn.

Material type:

Text

Publication details: New Jersey John Wiley & Sons 2008

Availability: Not available: Central Library: Checked out (1).

2.

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Fundamentals of microfabrication and nanotechnology: Vol-I solid-state physics, fluidics and analytical techniques ... by

Madou, Marc J

Edition: 3rd ed.

Material type:

Text

Publication details: New York CRC Press 2012

Availability: Items available for reference: Central Library: Not for loan (1)Call number: 621.38152 MAD.

3.

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Fundamentals of microfabrication and nanotechnology:Vol-II manufacturing techniques for microfabrication and nanotechno by

Madou, Marc J

Edition: 3rd ed.

Material type:

Text

Publication details: New York CRC Press 2012

Availability: Items available for reference: Central Library: Not for loan (1)Call number: 621.38152 MAD.

4.

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Fundamentals of microfabrication and nanotechnology:Vol-III from MEMS to bio-MEMS and bio-NEMS by

Madou, Marc J

Edition: 3rd ed.

Material type:

Text

Publication details: New York CRC Press 2012

Availability: Items available for reference: Central Library: Not for loan (1)Call number: 621.38152 MAD.

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