| 000 | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 005 | 20251203110736.0 | ||
| 020 | _a008044460X | ||
| 082 |
_a621.38152 _bMAT |
||
| 100 | _aMachlin E.S. | ||
| 245 |
_aMaterials science in microelectronics; Vol.1 _bthe relationships between thin film processing and structure |
||
| 250 | _a2nd ed. | ||
| 260 |
_aAmsterdam _bElsevier _c2005 |
||
| 300 |
_axiv, 256 p. _c26 cm. _bHB |
||
| 630 | _aMaterials science- Microelectronics | ||
| 964 |
_b _c _d _e _f _g_ |
||
| 997 | _a120122 C | ||
| 999 |
_c101032 _d101032 |
||