| 000 | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 005 | 20251203112242.0 | ||
| 020 | _a9781420055115 | ||
| 082 |
_a621.38152 _bMAD |
||
| 100 | _aMadou, Marc J | ||
| 245 |
_aFundamentals of microfabrication and nanotechnology: Vol-I _bsolid-state physics, fluidics and analytical techniques ... |
||
| 250 | _a3rd ed. | ||
| 260 |
_aNew York _bCRC Press _c2012 |
||
| 300 |
_axiv,641p. _c26cm. _bHB |
||
| 500 | _aincludes index | ||
| 690 | _aMicroelectronics | ||
| 690 | _aIntegrated circuits-Design and construction | ||
| 690 | _aMicroelectromechanical systems-Design and construction | ||
| 690 | _aMachining | ||
| 690 | _aLasers-Industrial applications | ||
| 690 | _aMicroelectronic packaging | ||
| 690 | _aMicrofabrication | ||
| 690 | _aNanostructured materials-Design and construction. | ||
| 964 |
_b _c _d _e _f _g_ |
||
| 997 | _a188878 R | ||
| 999 |
_c152829 _d152829 |
||